Room 1224 Kemper Hall is a Class 100 cleanroom. “Class 100″ means that there are no more than 100 dirt particles per cubic meter of air. The air that enters the cleanroom passes through high efficiency particulate air filters (HEPA filters) and flows from the cleanroom ceiling downwards-pushing any dust down and out.
Entering the Cleanroom
Rules for entering the Clean room:
1. Do not bring food or drink into the clean room
2. No smoking in the clean room
4. You must wear full-length pants and closed toed shoes
5. contact lenses are ok
6. No makeup
7. You may bring ball-point pens, cleanroom paper lab notebooks, tweezers, wafer boxes, and samples in a sealed container.
8. Any chemicals not supplied by CNM2 that is on the approved list of chemicals must be brought to lab staff to place in the pass through for you (oxidiziers require special permission)
9. You must ask the lab staff for permission to bring in any equipment from outside.
Entry by Access Code
You may enter the lab by entering your code into the keypad. The computer will log your entry and release the door.
If the door doesn’t release, clear the system and reenter your code. If the door still won’t release, contact CNM2 Staff. The access code determines who to bill for lab use and tracks who was present for mishaps so do not give your access code to anyone else nor use anyone else’s code. Only authorized personnel evidenced by an access code may enter, no visitors.
Reserving Time On a Tool
You may reserve time on the tool you intend to use in advance. If no one has reserved the tool, you may use it on a “first come, first served” basis. Reservations are made though BADGER.
- Do not remove any equipment from the lab;
- Do not modify or cut test cables, patch cords, or adapters;
- Do not move equipment from one bench to another.
Each piece of equipment, or tool, has its own protocol. What do you do if you break a monitor wafer in the oxidation furnace? How do you load a wafer into the spinner? If you don’t know, ask a superuser or CNM2 Staff. Review the operating manual each time you use the tool. The checklists will help you not to overlook important steps.
Cleanroom Supplies and Practices
Use the pyrex and teflon beakers with DI water and electronic grade chemicals. Never remove these “clean” beakers from the lab, or the wet benches or flume hoods that it is assigned to.
The lab provides clean wipes that are especially made for cleanroom applications. They are expensive like all cleanroom supplies. Do not waste them! Do not leave single wipes on work table or wet benches if leaving the cleanroom.
Never touch silicon wafers by hand. Instead, buy a special pair of tweezers designed for handling wafers. These are available at the medical supplies desk in the ASUCD bookstore.