Recipes

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Welcome to our recipe page where we have processing information on many different photoresists and devices. Learn about each particular photoresists and how to make nano- and micro-scale devices. If you have any questions or suggestions feel free to contact us and let us know!

Photoresists       Device Processes
Positive Negative Electrom Beam Lithography Other General
SPR 220-7
(P | D)
KMPR 1005
(PD)
PMMA 950k in Anisole
(P | D | MSDS)
Lift-Off-Layer
(P | D)
PDMS Molding
(P | D)
Shipley 1813
(PD)
  LOL2000/PMMA Bilayer Process
(P | D | MSDS)
   
SPR 955 CM0.7
(PD)
  ZEP-520A
(PD | MSDS)
   
KMPR 65 and 100
(P)
  Centimeter to Nanometer (P)    

P: Process
D: Datasheet
MSDS: Material Safety Data Sheet

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