Safety & Emergency

ristricted entry signCNM2 provides free training for lab members in order to fabricate devices both safely and effectively. Our training environment is relaxed but provides an extensive and thorough understanding of implemented engineering controls as well as the cleanroom’s hazards, how to avoid them, and how to mitigate them.

Each lab member will be trained in protocols regarding lab entry, chemical storage, disposal of materials, limiting exposure and personal protective equipment (PPE) as described in the chemical hygiene plan. Lab members must also take additional training in order to handle extremely hazardous chemicals such as concentrated acids, oxidizers, and toxins. Supplementary and refresher training is also available, and well utilized by many lab members.

In order to gain access into the cleanroom, users are required to take and pass a short test on our documented rules and safety protocols. Please read the following chemical hygiene plan for learning these protocols and completing the multiple choice test:

CNM2 Chemical Hygiene Plan

You can also review the standard operating procedures (SOPs) for the concentrated chemicals available at CNM2. 

Current SOPs: Available chemicals provided by NCNC

Acetic Acid | Ammonium Fluoride | Ammonium Hydroxide | BOE | Hydrochloric Acid (HCl) | Hydrofluoric Acid (HF)Hydrogen Peroxide | Nitric Acid | Phosphoric Acid | Potassium Hydroxide | Sulphuric Acid

Current SOPs: Common chemical mixtures 

Aqua Regia |PAN |Piranha | RCA1 | RCA2 | SulphoNitric    

Chemical Use

The chemicals used in the Center for Nano and Micro Manufacturing are extremely hazardous. Table 1 below lists some of the more common chemicals used in the lab and their concentrations.

Table 1: Concentrations of Common Chemicals in the Center for Nano and Micro Manufacturing
Chemical TypeChemicalConcentration
AcidsHydrofluoric Acid (HF)49%
Hydrochloric Acid40%
Sulfuric Acid96%
Phosphoric Acid86%
Nitric Acid68%
Acetic Acid100%
BasesAmmonium Hydroxide29%
Potassium Hydroxide45%
OxidizersHydrogen Peroxide30%
Nitric Acid68%
FluoridesAmmonium Fluoride66%
Buffered Oxide Etch50%
Hydrofluoric Acid49%
Solvents
Acetone100%
Isopropanol100%
Methanol100%
Toluene100%

These concentrations, necessary for microfabrication, are much higher than those found in conventional undergraduate chemistry labs. Many of these chemicals can cause severe damage to human tissue. Therefore, you must be alert and cautious when using these chemicals to avoid all contact with them. When you follow the safety procedures below, your risk of injury will be small. Tables 2 and 3 below show some common corrosive and flammable chemicals, respectively, used in the lab.

Table 2: Some Corrosives Used in the Center for Nano and Micro Manufacturing
Chemical TypeChemical
Corrosives
Ammonium Fluoride
Ammonium Hydroxide
Buffered Oxide Etch; (BOE)
Hydrochloric Acid
Hydrofluoric Acid
Phosphoric Acid
Potassium Hydroxide
Resist Developer
Sulfuric Acid

 

Table 3: Some Flammable Chemicals Used in the Center for Nano and Micro Manufacturing
Chemical TypeChemical
Flammables
Acetone
Chlorobenzene
Methanol
Isopropanol
Resist Primer
Xylene

 

 

Bringing Chemicals into the Lab

The person (or persons) bringing a new chemical substance into the lab must provide the following to CNM2 Staff:

  1. Storage Compatability of ChemicalsA current Material Safety Data Sheet for the chemical (the only exception is when the chemical substance has been specifically synthesized for a research project);
  2. A completed Microfabrication Chemical Substance Tracking Form which contains:
    • where the chemical will be stored,
    • how and in what areas it will be used,
    • what waste products will be created by the process,
    • how the chemical and waste products will be stored, and removed from the facility.

Within 24 hours, CNM2 Staff will approve the chemical’s introduction to the facility, or schedule a meeting to clarify remaining issues. Once safety issues have been addressed to the satisfaction of the user and the facility manager, the chemical can be brought in.

Emergency and Evacuation Maps

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